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发明名称
EPITAXIAL GROWTH METHOD
摘要
申请公布号
JPH05226265(A)
申请公布日期
1993.09.03
申请号
JP19920030885
申请日期
1992.02.18
申请人
ROHM CO LTD
发明人
TSURUTA MASATAKA
分类号
C30B23/02;H01L21/02;H01L21/205;H01L21/84;H01L27/12
主分类号
C30B23/02
代理机构
代理人
主权项
地址
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