Liq. phase epitaxy appts. - comprises several walls enclosing melt and boundary wall bordering growing plane

摘要

Liq. phase epitaxy appts. comprises several walls to enclose a melt, in which is dissolved the material to be grown on a substrate (16) in a growing plane (18). There is a boundary wall (11) that borders the growing plane at a start or at right angles. The novelty is that at least one slot (19.1) is located in the boundary wall (11) at a distance from the boundary line (17) between the growing plane and the boundary wall. USE - The appts. is used to grow thin layers on a substrate.