| 摘要 |
The invention relates to a pressure difference sensor with a semiconductor measuring diaphragm which is clamped between two bearers of insulating material to form an inner chamber; each of the bearers is fitted with a flat electrode on the inside. In order with such a pressure difference sensor to compensate for the effect of the static pressure on the accuracy of measurement, the pressure difference sensor (1) has, in the clamping region (5) of the semiconductor measuring diaphragm (2), an internal, pressurised equalisation chamber (19, 21, 22, 23) extending above both bearers (3, 4) and running around the inner chambers (10, 11). |
| 申请人 |
SIEMENS AG, 80333 MUENCHEN, DE |
发明人 |
ARNDT, FRANK, DR.RER.NAT., 1000 BERLIN, DE;HOUDEAU, DETLEF, DIPL.-ING., 1000 BERLIN, DE;RAUCH, MORITZ VON, 1000 BERLIN, DE;SCHLAAK, HELMUT, DR.-ING., 1000 BERLIN, DE |
