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发明名称
VERFAHREN ZUM HERSTELLEN VON GROSSEN HALBLEITERSCHALTUNGEN.
摘要
申请公布号
DE68907782(D1)
申请公布日期
1993.09.02
申请号
DE1989607782
申请日期
1989.04.28
申请人
GENERAL ELECTRIC CO., SCHENECTADY, N.Y., US
发明人
YERMAN, ALEXANDER JOHN, SCOTIA NEW YORK 12302, US
分类号
G01R31/26;H01L21/66;H01L21/768;H01L21/82;(IPC1-7):H01L21/60;H01L23/52;H01L21/90
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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