发明名称 SOI-TYPE SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME
摘要 An SOI-type semiconductor device having a semiconductor film (15) of a reduced thickness formed on an insulating film (12). The SOI-type semiconductor device has a semiconductor substrate (11), the insulating film (12) that has recessed portions (13a, 13b) and that is formed on the semiconductor substrate (11), and electrically conductive members (14a, 14b) buried in the recessed portions (13a, 13b). The device further has the semiconductor film (15) formed on the insulating film (12) and impurity regions (16) that are formed in the semiconductor film (15) and that are electrically connected to the electrically conductive members (14a, 14b).
申请公布号 WO9317458(A1) 申请公布日期 1993.09.02
申请号 WO1990JP01124 申请日期 1990.09.04
申请人 YOSHIDA, TOHRU 发明人 YOSHIDA, TOHRU
分类号 H01L27/12;H01L21/336;H01L21/74;H01L29/78;H01L29/786 主分类号 H01L27/12
代理机构 代理人
主权项
地址