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发明名称
A PROGRAMMABLE MULTIZONE GAS INJECTOR FOR SINGLE-WAFER SEMICONDUCTOR PROCESSING EQUIPMENT
摘要
申请公布号
EP0550058(A3)
申请公布日期
1993.09.01
申请号
EP19920122099
申请日期
1992.12.29
申请人
TEXAS INSTRUMENTS INCORPORATED
发明人
MOSLEHI, MEHRDAD M.;MATTHEWS, ROBERT T.;DAVIS, CECIL J.
分类号
C23C16/44;C23C16/455;C23C16/52;C23F4/00;C30B25/14;H01L21/00;H01L21/205;H01L21/302;H01L21/31;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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