Apparatus for inspecting the surface of materials.

摘要

An apparatus for inspecting the surface of a sheet-like object, comprising: a movable stage with an object mounted thereon; lighting means for lighting the object on the stage, particularly by making a plurality of illumination lights respectively having different wavelengths incident on the surface of the object from respective predetermined directions; image pickup means for fetching the image of the object under illumination of said lighting means as image data or the images of parts of the object as image data obtained on the respective different wavelengths; image data processing means for inspecting said image data for defects; and synchronization control means either for flashing the lighting means at a predetermined time interval just after the said stage commences its movement, synchronously with fetching the image data or for flashing the lighting means and simultaneously fetching the image data obtained on the respective different wavelengths, synchronously with the object on the stage reaching respective predetermined positions while moving said stage.