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发明名称
CONDUCTOR AND PRODUCTION THEREOF
摘要
申请公布号
JPH05222515(A)
申请公布日期
1993.08.31
申请号
JP19910126783
申请日期
1991.04.30
申请人
SONY CORP
发明人
TAKAHASHI NOBORU
分类号
C23C14/06;C23C14/58
主分类号
C23C14/06
代理机构
代理人
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