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发明名称
ORGANOMETAL VAPOR GROWTH DEVICE
摘要
申请公布号
JPH05221790(A)
申请公布日期
1993.08.31
申请号
JP19920019607
申请日期
1992.02.05
申请人
SUMITOMO ELECTRIC IND LTD
发明人
UEDA TOSHIO
分类号
C30B25/02;C30B25/12;C30B25/14;H01L21/205
主分类号
C30B25/02
代理机构
代理人
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