发明名称 |
Exhaust apparatus and vacuum pumping unit including the exhaust apparatus |
摘要 |
An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.
|
申请公布号 |
US5240381(A) |
申请公布日期 |
1993.08.31 |
申请号 |
US19920833853 |
申请日期 |
1992.02.12 |
申请人 |
EBARA CORPORATION |
发明人 |
NAGAI, KAZUTOSHI;SATAKE, TOHRU;HAYASHI, HIDEAKI;YASUI, TAKANARI |
分类号 |
H01J41/14;H01J41/18 |
主分类号 |
H01J41/14 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|