| 摘要 |
PURPOSE:To provide a method capable of laser-beam etching a double layered base material consisting of a metallic base layer and an insulating film layer having a comparatively large area. CONSTITUTION:The double layered base material 2 consisting of the metallic base material layer and the insulating 1 film layer is wound on the side wall of a columnar rotating body 1. The rotating body 1 is rotated while being moved back and forth in the direction of the rotating axis and a laser beam such as the ultraviolet ray laser beam irradiates on the wound base material 2 with a photomask 3. |
