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发明名称
POLYSILPHENYLENESILOXANE, PRODUCTION PROCESS THEREOF, AND RESIST MATERIAL AND SEMICONDUCTOR DEVICE FORMED THEREOF
摘要
申请公布号
US5240813(A)
申请公布日期
1993.08.31
申请号
US19900614338
申请日期
1990.11.15
申请人
FUJITSU LIMITED
发明人
WATANABE, KEIJI;OIKAWA, AKIRA;FUKUYAMA, SHUN-ICHI;YAMAGAMI, MASAAKI;NAMIKI, TAKAHISA
分类号
C08G77/52;G03F7/075
主分类号
C08G77/52
代理机构
代理人
主权项
地址
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