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发明名称
COUPLING TYPE CLEAN SPACE
摘要
申请公布号
JPH05223300(A)
申请公布日期
1993.08.31
申请号
JP19920026451
申请日期
1992.02.13
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
MORI KAZUHIRO;KUBOTA YOSHIYUKI;HASHIMOTO NAOYUKI;NOGIWA TATSUKI
分类号
F24F7/06;B01D46/42;F24F3/16;H01L21/00
主分类号
F24F7/06
代理机构
代理人
主权项
地址
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