| 摘要 |
PURPOSE:To easily detect small-size foreign matter with high accuracy, by blowing up the small-size foreign matter by a jet fluid to irradiate the same from the side surface with fanwise laser beam. CONSTITUTION:Small-size foreign matters 2 are blown upwardly from a container 1 by the air flow 4 from an air pipe 3. The laser beam 9a from a He-Ne laser 5 is expanded in its beam diameter by an expander 6 consisting of a convex lens 7a and a collimator 7b to become laser beam 9b which in turn becomes fanwise slit beam 9c through a columnar lens 8 to irradiate the vicinity of the upper end of the container 1. The beam 9c impinges against the small-size foreign matters 22, and reflected and scattering beams are incident to a camera 10 to be displayed on a monitor apparatus 14 and inputted to an image processing part 13 as an image signal and the presence, number and the size of the small-size foreign matters 2 are detected. By this method, the small-size foreign matters in the container 1 can be simply and easily detected with high accuracy. |
