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发明名称
SEMICONDUCTOR WAFER AND ITS PRODUCTION
摘要
申请公布号
JPH05218369(A)
申请公布日期
1993.08.27
申请号
JP19920040584
申请日期
1992.01.31
申请人
CANON INC
发明人
MIYAWAKI MAMORU
分类号
H01L21/02;H01L27/12
主分类号
H01L21/02
代理机构
代理人
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地址
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