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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05218319(A)
申请公布日期
1993.08.27
申请号
JP19920056401
申请日期
1992.02.06
申请人
HITACHI DENSHI LTD
发明人
AKAHORI HIDEO
分类号
H01L27/082;H01L21/8228
主分类号
H01L27/082
代理机构
代理人
主权项
地址
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