| 摘要 |
<p>PURPOSE:To provide a wafer carrier box which has excellent anti-static effect and which is capable of electrically effectually protecting an accomodated wafer and of carrying a wafer just after accomodating the wafer. CONSTITUTION:A closed box for a wafer carrier box 1 is constructed with a box body 2 for accomodating a plurality of wafers 12 and a cover 3 for covering an opening in the box body 2. A highly electrical conductive wire material 7 is buried in the interior of constituting surfaces of the box over the whole box. Further, a protrusion part 9 is formed on the bottom of the box body 2. There is provided on the protrusion part 9 an exposed part 8 for external connection with the wire material 7. The wire material 7 is electrically connected with the outside through the exposed part 8. Since the wafer box 1 is electrically earthened to prevent electrical charging, and hence the accomodated wafer 12 is electrically protected.</p> |
