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发明名称
VAPOR GROWING APPARATUS FOR COMPOUND SEMICONDUCTOR AND VAPOR GROWING METHOD
摘要
申请公布号
JPH05217910(A)
申请公布日期
1993.08.27
申请号
JP19920020214
申请日期
1992.02.05
申请人
SEIKO EPSON CORP
发明人
SEKI TETSUYA
分类号
F27D1/12;H01L21/205;H01L21/31
主分类号
F27D1/12
代理机构
代理人
主权项
地址
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