摘要 |
PURPOSE: To provide a thin film conductive device having a high-conductive bus bar, by vacuum-depositing the bus bar composed of a conductive material adhered closely to a thin film conductive coating which is vacuum-deposited on one surface of a dielectric substrate. CONSTITUTION: A vacuum-deposited thin film coating 16 is provided on one surface 14 of a substrate 1 composed of a dielectric material. A thin film conductive layer is obtained by vacuum-depositing a conductive bus bar 17 thereon. As the substrate 1, a flexible material, for example, a plastic sheet of polyester such as PET, polyamide, polycarbonate or the like, is preferable. As a material for the coating 16, stainless steel, Ni, Cr, Ti, ITO or the like is used. As the bus bar 17, copper, silver, gold, aluminum or the like is used. A protection coating 21 is deposited on the thin film 16. As the coating 21, SiO2 or SiOx can be used. |