| 摘要 |
<p>PURPOSE:To cause circuit measuring terminals to touch securely and to prevent the terminals from touching each other and shortcircuiting, even when a pad pitch is narrower or the pad size is smaller, or the pad number increases, by using as circuit measuring terminals needle crystals having a constant titled angle against the normal direction of a board surface grown from the board surface. CONSTITUTION:A silicon single-crystal board 21 is manufactured so as to be titled by a constant angle, 5 degrees for example, against the normal direction of the surface of the board 21. And needle crystals 23 are grown on the surface of the board 21 by using the technique of lithography, dry etchin, etc. Then, conductive films are coated on the surfaces of the needle crystals 23 by electroless plating, and measuring needle terminals are formed. If pressure is applied vertically to the board 21 of such measuring terminals as these, the needle crystals 23 are elastically deformed in a constant direction, and the terminals are prevented from touching each other and shortcircuiting. And it becomes possible to miniaturize the needle crystals 23 or wiring patterns and cope with a narrower pitch, since technique used for a fine working process for LSIs is available for their production.</p> |
