MANUFACTURE OF SINGLE-CRYSTAL SILICON,申请号JP19920018778-传众专利搜索

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发明名称	MANUFACTURE OF SINGLE-CRYSTAL SILICON
摘要
申请公布号	JPH05217906(A)	申请公布日期	1993.08.27
申请号	JP19920018778	申请日期	1992.02.04
申请人	MITSUBISHI HEAVY IND LTD	发明人	SAKAMOTO HITOSHI
分类号	C30B25/16;C23C16/24;H01L21/205;H01L21/263	主分类号	C30B25/16
代理机构		代理人
主权项
地址

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