| 摘要 |
PURPOSE:To enable the execution of development of resist patterns with high accuracy by providing a load cell which measures the liquid volume in a compounding tank and an automatic titration device by potential difference measurement and executing control by a sequence controller. CONSTITUTION:A developing stock soln. is fed from a developing stock soln. tank 1 to a compounding tank 3 by using a transfer pump 2. This transfer pump 2 is stopped when a prescribed volume is attained. The transfer rate of this developing stock soln. is controlled by control valves 4 and 5. Ultrapure water is then sent from a piping 6 to the compounding tank 3. The volume of the ultrapure water is controlled by a control valve 7. The valve is shut when a set volume is attained. The respective liquid volumes sent to the compounding tank 3 are measured by a load cell 8 and the respective control valves 4, 5 and pump 2 are rapidly and exactly controlled via a sequence controller 9. After the developing stock soln. and the ultrapure water are fed into the compounding tank 3, the liquids in the tank are mixed for a specified period of time by using a circulating pump 10 while the liquid volumes are controlled by a control valve 11. The liquid mixture is partly sent to the automatic titration device 12 by which the concn. of the liquid mixture is measured. |
