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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05218137(A)
申请公布日期
1993.08.27
申请号
JP19920019279
申请日期
1992.02.05
申请人
TOSHIBA CORP
发明人
MORI MIKI;SAITO MASAYUKI
分类号
H01L21/60;H01L21/66
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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