摘要 |
PURPOSE: To completely burn out organic binder resin with almost no oxidation of copper paste metal without decomposing of a ceramic layer by sintering a laminated non-sintered green complex, containing a copper paste metal by microwaves. CONSTITUTION: This composite material containing thermoplastic organic binder, wherein particles selected from a group comprising glass particles and the mixture of the glass particles and crystalline particles are dispersed, is used, and a green sheet, which forms a patterned metallic layer and has the sintering temperature less than the melting point of a conductor, is formed. Then, after a conductor-forming structure pattern is formed on the surface of the green sheet, a second green sheet is overlapped on the surface of this green sheet, so as to hold the pattern. Then, the overlapped and laminated sheets are laminated together, and the laminated body is heated by microwaves to a burn-out temperature. Thus, a binder in the green sheet is decomposed and removed. Thereafter, the laminated body is sintered, and the desired ceramic composite structure is obtained. |