METHOD FOR FORMING THIN-FILM COMPOUND PATTERN THROUGH HIGH-LUMINANCE CONVERGENT ION BEAM,申请号JP19910073947-传众专利搜索

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发明名称	METHOD FOR FORMING THIN-FILM COMPOUND PATTERN THROUGH HIGH-LUMINANCE CONVERGENT ION BEAM
摘要
申请公布号	JPH05217896(A)	申请公布日期	1993.08.27
申请号	JP19910073947	申请日期	1991.03.13
申请人	SHIMADZU CORP	发明人	NAGAMACHI SHINJI
分类号	C23C14/30;C30B25/06;H01L21/027;H01L21/203	主分类号	C23C14/30
代理机构		代理人
主权项
地址

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