OXIDATION DIFFUSION TREATING APPARATUS,申请号JP19920040747-传众专利搜索

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发明名称	OXIDATION DIFFUSION TREATING APPARATUS
摘要
申请公布号	JPH05217929(A)	申请公布日期	1993.08.27
申请号	JP19920040747	申请日期	1992.01.31
申请人	TOKYO ELECTRON TOHOKU KK;MITSUBISHI ELECTRIC CORP	发明人	WATANABE SHINGO;KAMIDATE SHINICHI
分类号	H01L21/22;C30B31/16;H01L21/31	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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