发明名称 IONIC PLATING WITH THREE ELECTRODES
摘要 PURPOSE:To ionize efficiently without setting a hot filament by applying a positive voltage across a grounded evaporation source and a third electrode arranged in the back of or near the material to be palted in order to heat the evaporation source and to emit thermions.
申请公布号 JPS5275668(A) 申请公布日期 1977.06.24
申请号 JP19750152394 申请日期 1975.12.19
申请人 KOGYO GIJUTSUIN *JAPAN* 发明人 ENOMOTO SUKETSUGU
分类号 C23C14/32 主分类号 C23C14/32
代理机构 代理人
主权项
地址