发明名称 Apparatus and method for controlling the formation of large area diamond films and diamond film patterns
摘要 This invention relates to an apparatus and method for controlling the formation of large area diamond films using heated refractory materials such as graphite or carbon shaped in the form of rods, grids or baskets. Such structures of this type, generally, allow large area diamond films to be created on a substrate in an efficient, cost-effective manner. <IMAGE>
申请公布号 ZA9209643(B) 申请公布日期 1993.08.27
申请号 ZA19920009643 申请日期 1992.12.11
申请人 GENERAL ELECTRIC COMPANY 发明人 SUDHIR DATTATRAYA SAVKAR
分类号 C30B25/02;C23C16/27;C23C16/513;C23C16/52;C30B25/08;C30B25/16;C30B29/04 主分类号 C30B25/02
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