| 摘要 |
The apparatus comprises (1) a hopper type housing (31) having a chute (31a), (2) a substrate transfering device attached to the upper portion of the housing, (3) a developing solution tank (32) connected to the chute, (4) a developing solution pumping system for supplying the developing solution to a defined height from the upper face of the substrate transfering device, (5) a device for filtering the developing solution being recovered from the housing, the device being located between the chute and the tank, (6) a device for washing and drying the transfering substrate. The apparatus enhances a productivity and decreases the waste of the developing solution.
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