BEWEGUNGSEINRICHTUNG ZUR MIKROBEWEGUNG VON OBJEKTEN.

摘要

The micromovement device, providing precise stable movement of the microscope specimen in the nanometer range, uses 3 piezoelectric elements (1,2,3) supporting the microscope specimen (6), each deformed by an applied control voltage to provoke a corresponding shift in the position of the specimen (6). Pref. each of the piezoelectric elements comprises a hollow cylinder with an electrically conductive coating applied to one cylinder wall and a series of relatively insulated electrodes applied to the opposing wall. The elements are pref. evenly spaced in a ring around a raster element (4) supporting the scanning needle (7) and mounted on a common support phase (8).