THIN FILM SEMICONDUCTOR ELEMENT, DEVICE AND MANUFACTURING METHOD THEREOF,申请号JP19920016672-传众专利搜索

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发明名称	THIN FILM SEMICONDUCTOR ELEMENT, DEVICE AND MANUFACTURING METHOD THEREOF
摘要
申请公布号	JPH05218428(A)	申请公布日期	1993.08.27
申请号	JP19920016672	申请日期	1992.01.31
申请人	HITACHI LTD	发明人	KAWACHI GENSHIROU
分类号	H01L21/265;H01L21/76;H01L21/762;H01L29/78;H01L29/786	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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