发明名称 |
Radiation-sensitive composition containing 1,2-quinonediazide compound, alkali-soluble resin and monooxymonocarboxylic acid ester solvent |
摘要 |
A radiation-sensitive resin composition comprising a solution of an alkali-soluble resin and a radiation-sensitive compound in a solvent comprising a monooxymonocarboxylic acid ester. This composition has a high storage stability (i.e., a very small amount of fine particles are formed during storage) and is suited for use as a resist for making integrated circuits.
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申请公布号 |
US5238774(A) |
申请公布日期 |
1993.08.24 |
申请号 |
US19910710113 |
申请日期 |
1991.06.04 |
申请人 |
JAPAN SYNTHETIC RUBBER CO., LTD. |
发明人 |
HOSAKA, YOSHIHIRO;NOZUE, IKUO;TAKATORI, MASASHIGE;HARITA, YOSHIYUKI |
分类号 |
G03F7/004;G03F7/008;G03F7/022 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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