发明名称 Method and apparatus for forming bump
摘要 A bump having a shape adapted to bonding of a flip chip method and an enough volume is efficiently accurately formed at low costs. By applying a pressure into a chamber, a fused solder 8 in the chamber 1 is extruded from a micro opening 3 and adhered onto a pad 12. After that, by eliminating the pressure, the fused solder is separated by the surface tension of the fused solder itself and is allowed to remain as a solder bump onto the pad.
申请公布号 US5238176(A) 申请公布日期 1993.08.24
申请号 US19920840433 申请日期 1992.02.24
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 NISHIMURA, HIDEO
分类号 H01L21/60;B23K1/002;H01L21/48;H05K3/34 主分类号 H01L21/60
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