发明名称 |
PROCESS FOR PREPARING SRTIO3-YBA2 CU3 O7 LAYER SYSTEM AND LAYER SYSTEM CONSISTING OF SRTIO3 AND YBA2 CU3 O7 |
摘要 |
The invention relates to a process for producing YBa2Cu3O7 layers grown so as to be c-axis-oriented and to a layer structure of this type. In spite of c-axis-oriented deposition, from a certain layer thickness onwards a-axis-oriented domains occur to an increasing extent. Faults produced thereby are eliminated by applying an SrTiO3 interlayer of a suitable thickness, so that alternating YBa2Cu3O7 and SrTiO3 layers are produced. Accordingly alternating layer sequences make up a layer structure thus produced. YBa2Cu3O7 layers are expediently no thicker than 500 nm. SrTiO3 interlayers have a thickness of 20 - 30 nm. <IMAGE> |
申请公布号 |
JPH05214513(A) |
申请公布日期 |
1993.08.24 |
申请号 |
JP19920293387 |
申请日期 |
1992.10.30 |
申请人 |
FORSCHUNGSZENTRUM JUELICH GMBH |
发明人 |
HERUMUUTO ZORUTONAA;URURITSUHI POTSUPE;KUNUUTO URUBAN |
分类号 |
C23C14/08;C30B23/02;H01L39/12;H01L39/24 |
主分类号 |
C23C14/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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