发明名称 |
METHOD OF FORMING RECESSED PROFILE ON FERRITE SINGLE CRYSTAL BY CHEMICAL ETCHING |
摘要 |
A method of forming, on a surface of a Mn-Zn ferrite single crystal, a recessed portion which has a predetermined cross sectional profile and at least one straight ridge (15) which defines a boundary in the profile. An etching mask (14) is formed on the surface of the ferrite single crystal, so as to provide the recessed portion by etching such that the straight ridge (15) of the profile lies in a (100) or (110) plane of the ferrite single crystal which is perpendicular to the surface on which the etching mask is formed. The ferrite single crystal with the etching mask is exposed to an aqueous solution which substantially consists of water and the balance consisting principally of phosphoric acid, whereby the surface of the ferrite single crystal is chemically etched, so as to produce the recessed portion such that an inclined surface is formed so as to extend parallel to the straight ridge, and such that the straight ridge defines an edge of the inclined surface. |
申请公布号 |
EP0336525(B1) |
申请公布日期 |
1993.08.25 |
申请号 |
EP19890300126 |
申请日期 |
1989.01.06 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
TAKEYA, FUMINORI;FUKUDA, NAOYA;SUZUKI, MIKI |
分类号 |
C30B33/10;C30B33/00;G11B5/10;G11B5/127;G11B5/187;G11B5/193;G11B5/706;H01F1/34 |
主分类号 |
C30B33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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