| 摘要 |
PURPOSE:To negate the moment of rotations due to friction force between an inspected material and a shoe, face a probe exactly to the inspected object and enable stable scanning by combining a housing and a gimbal mechanism with a moment generator. CONSTITUTION:An inspected material 1 delivered in the direction A is scanned with a probe 2 fixed to a housing 3. An inspecting head touches the surface of the inspected material 1 via a shoe 4. To allow the probe 2 inclining in accordance with the wave and roughness of the surface, a gimbal 5 having the freedom of rotation to the delivery direction and a gimbal 6 having the freedom of rotation in the direction parallel to that of transfer are provided. Also to negate the rotation force in the vertical direction generated by the friction force between the inspected material 1 and the shoe 4, one end of a constant load spring 8 is fixed to the housing 3 and the other end to the gimbal 5 and one end of a constant load spring 9 is fixed to the gimbal 5 and the other end to the gimbal 6. By this, the probe 2 can always be kept to the right direction even when the inspected material 1 is delivered to complex directions. |
