发明名称 Turbomolecular pump
摘要 A high vacuum pump comprising an in-line connection on a single drive shaft of an axial turbomolecular compressor and a peripheral compressor where the pump provides better than 10-7 Pascal inlet when exhausting to atmosphere. The peripheral compressor has a two stage optimized Gaede design which encloses the impellers in a shroud reducing the top and bottom volume surrounding the impellers and providing a large separation pressure drop region between stages of said peripheral compressors to reduce axial leakage.
申请公布号 US5238362(A) 申请公布日期 1993.08.24
申请号 US19920917564 申请日期 1992.07.21
申请人 VARIAN ASSOCIATES, INC. 发明人 CASARO, FAUSTO;DOLCINO, LUIGI;HABLANIAN, MARS;LEVI, GIAMPAOLO
分类号 F04D19/04;F04D25/16 主分类号 F04D19/04
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