| 摘要 |
PURPOSE:To enable a gas which adheres to an NiO thick film to be cracked and then oxygen to be moved to another surface for refreshing sensitivity and response by forming the NiO thick film on one surface of ZrO2 substrate where a comb electrode is formed on both surfaces and by applying a DC voltage to the comb electrode of both surfaces of a substrate. CONSTITUTION:Comb-type electrodes 2A, 2B, 2C, and 2D are printed on both surfaces of ZrO2 substrate 1 which is an improved conductor of oxygen ion and NiO thick film 3 is formed on one surface which becomes a measurement surface, thus constituting a gas sensor. DC voltages are applied from bias terminals 4B and 4C to the comb-type electrodes 2B and 2C on both surfaces at the time of measurement, thus enabling a reaction gas which is adhered on the surface of the NiO thick film 3 to be decomposed, and at the same time the surface of the NiO think film 3 to be constantly refreshed by moving oxygen to the side of the other surface 1B. 5A and 5B are measurement terminals which are connected to base edges 2a and 2b of the comb-type electrodes 2A and 2B at the side of NiO thick film 3 and are connected to a circuit for measuring resistance. |
