INSPECTING APPARATUS OF WIRING PATTERN

摘要

PURPOSE:To suppress the generating frequency of defects thereby to eventually conduct the visual confirmation efficiently in a wiring pattern-inspecting apparatus which inspects the defect of a wiring pattern of a printed board or a photo mask etc. CONSTITUTION:The width of a line of a wiring pattern formed on a printed board 101 is measured, and compared with one or more optional threshold values by a defect detecting means 106. The abnormality of the line width is detected per pixel unit. The detected connected pixels of the abnormal line width are degenerated to an isolated point pixel by an integrating means 107 in the integrating process. The connected pixels of the abnormal line width are thus integrated to one by hardware.