| 摘要 |
PURPOSE:To make it possible to discriminate the kinds of defects simply and accurately by discriminating the kinds of the defects on a surface under inspection based on the differentiated state of the luminance or the wavelength on a scanning line in a received light image. CONSTITUTION:Inspecting light is emitted from a light irradiation means 14 and cast on a surface under inspection 6. The reflected light is received with an image pickup means 16. The image pickup means 16 forms the received light image based on the received reflected light and outputs the image data to an image processing means 20. The imge processing means 20 performs the main scanning and the secondary scanning for inputted received light image data. When a defect is present on the surface under inspection 6, the luminance on the main scanning line passing the defect is basically located an a straight reference line having the gradient corresponding to the luminance gradient of the bright-dark light emitted from the light irradiation means 14. At the part of the region corresponding to the defect, the luminance is largely changed from the reference line. Therefore, the detection of the presence or absence of the defect and the discrimination of the kind of the defect can be performed based on the differentiated state of the luminance on the main scanning line. |
