| 摘要 |
<p>PURPOSE:To evaluate the minute structure at high resolution by casting the luminous flux from a light source means on the object having the minute structure, detecting the scattering dispersion characteristics of the scattered light based on the minute structure, and processing the scattering signals of the scattering distribution characteristics. CONSTITUTION:Light 11 emitted from a light source means 1 is made to be convergent light 35 through a lighting optical system 3. The light is converged on a minute region 21 on an object (e.g. mask). The convergent light 35 converged on the object 2 is scattered in the minute region 21 with the scattering distribution characteristics depending on the minute structure (e.g. pattern). Scattering light 41 is received with a detector 4, and the scattering distribution characteristics of the scattering light 41 undergo photoelectric conversion, and the result is detected. The data of the minute structure are extracted and analyzed with good S/N in a signal processing system 5 based on the detected scattering distribution characteristics. Thus, the minute structure is optically evaluated in high resolution.</p> |
