发明名称 ROLLING BEARING FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要 <p>PURPOSE:To enhance durability of a lubricating film by forming the lubricating film made of PTFE(polytetrafluoroethylene) having a specific average molecular weight on a surface where rolling friction or slide friction is generated, and forming numerous fine recesses on at least the surface where slide friction is generated. CONSTITUTION:Lubricating films 1a-3a made of PTFE having an average molecular weight of 5000 or lower (PTFE of a low molecular weight) are formed on the rolling surfaces of an inner race 1 and an outer race 2, the flange surface of the inner race 1, and the whole surface of a roller 3 in a cylindrical rolling bearing or the like. Numerous fine recesses 31 are randomly formed in the maximum depth of about 1.0-2.0mum at the rolling surface and flange surface of the inner race 1 by barreling so that the lubricating film 1a is formed into an island shape. Consequently, when a load is applied to the lubricating film 1a from a mating surface, a part of the film la is deeply inserted into the recess 31 so as to prevent the lubricating film 1a from being unnecessarily peeled off owing to an anchor effect of the inserted portion of the film.</p>
申请公布号 JPH05209627(A) 申请公布日期 1993.08.20
申请号 JP19920016438 申请日期 1992.01.31
申请人 NTN CORP 发明人 KONDO HIROMITSU;YAMADA HIROSHI
分类号 F16C33/62;F16C33/32;F16C33/66 主分类号 F16C33/62
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