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发明名称
DEVICE FOR SPRAYING OF LIQUID ON WAFER TREATMENT APPARATUS
摘要
申请公布号
JPH05211114(A)
申请公布日期
1993.08.20
申请号
JP19920158599
申请日期
1992.05.26
申请人
EATON CORP
发明人
JIYON MAASHIYARU HAARAN
分类号
H01L21/304;H01L21/00;H01L21/027
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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