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发明名称
C-BICMOS-HALBLEITERVORRICHTUNG UND HERSTELLUNGSVERFAHREN
摘要
申请公布号
DE4230858(A1)
申请公布日期
1993.08.19
申请号
DE19924230858
申请日期
1992.09.15
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP
发明人
UGA, KIMIHARU, ITAMI, HYOGO, JP;HONDA, HIROKI, ITAMI, HYOGO, JP;ISHIDA, MASAHIRO, ITAMI, HYOGO, JP;ISHIGAKI, YOSHIYUKI, ITAMI, HYOGO, JP
分类号
H01L21/8249;H01L27/06
主分类号
H01L21/8249
代理机构
代理人
主权项
地址
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