Microscopic observation of surface structures - using microscope with optical focussing provided at different surface level depths to give values stored and combined to give three=dimensional image

摘要

A table (10) onto which specimens (11) are located is vertically adjusted for examination by a microscope with an eyepiece lens (12), object lens (13), two semi-transmissive mirrors (14,15) and a fully reflecting mirror (16). The image reflected back from the surface is received by an optical detector, e.g. a CCD matrix chip (20). The electrical signal image is passed through a two-dimensional high-pass filter (21) and is conditioned (22,24) for input to a computer based image processor (26). This generates a sharp focussed image for transmission (29) and observation. ADVANTAGE - Provides high resolution and sharp focussing over structural depth range.