Method of reducing a spatial spread within an electron beam, and an electron beam apparatus suitable for carrying out such a method.

摘要

The invention relates to a method for energy selection within an electron beam. To this end, the electron beam apparatus (1) comprises an energy-dispersive member (20) which is preferably arranged in the vicinity of an electron source (3) generating an electron beam (7). The energy-dispersive member (20) widens the electron beam (7) in a dispersion direction. Energy selection is realised by selecting a number of pixels with a local energy width in an image plane (21) of the object (11). <IMAGE>