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发明名称
HEAT TREATMENT APPARATUS
摘要
申请公布号
JPH05206047(A)
申请公布日期
1993.08.13
申请号
JP19920033991
申请日期
1992.01.27
申请人
TOKYO ELECTRON SAGAMI LTD
发明人
OKASE WATARU;YAGI YASUSHI;KAWACHI SATOSHI
分类号
H01L21/22;H01L21/31
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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