| 摘要 |
PURPOSE:To reduce the temp. fluctuations of a cooler and stabilize the output of a laser oscillator by interposing a heat medium tank between the cooler and a heat exchanger and controlling the temp. of a heat medium to prescribed temps. CONSTITUTION:A heat medium tank 53 is interposed between a cooler 51 and a heat exchanger 49 provided with a laser oscillator 7. A warmer 71 is provided to this tank 53 and the rate of cooling is controlled only during cooling of the heat medium. A control device for stopping operation of at least one of the cooling capacity of the cooler 51 or the warming capacity of the warmer 71 or the like is provided, so that the temp. of the heat medium is kept within set temp. range. With such constituion, the time for preparation of operating the laser oscillator 7 is a constant temp. state is required to be slight, and a running cost is considerably reduced. |
