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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH05206081(A)
申请公布日期
1993.08.13
申请号
JP19920035742
申请日期
1992.01.28
申请人
SONY CORP
发明人
KADOMURA SHINGO
分类号
C23C16/50;C23F4/00;H01L21/302;H01L21/3065;H01L21/3205;H01L21/3213
主分类号
C23C16/50
代理机构
代理人
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