发明名称 HEATING FURNACE
摘要 PURPOSE:To effectively use energy by storing the heat of fluid circulating at forcibly cooling time and utilizing the stored heat again at its heating time, thereby shortening the temperature rising time. CONSTITUTION:A cover 3 is provided on the outer periphery of a furnace which is composed of a heat coil 1 secured by a piece 2 and a heat insulator 4, and a fluid flow passage space 6 is provided in the insulator 4. This space 6 is divided in double sections with a thin partition plate 7 to construct an outside flow passage 8 and an inside flow passage 9, which are connected at one respective ends. A supply tube system which is composed of a pump 11 and a supply tube 10 is connected to the passage 8, and an exhaust tube system which is composed of an exhaust tube 13, a heat accumulator 14 and a stop valve 15 is connected to the passage 9. The output tube 16 of the accumulator 14 is connected to a switching valve 12. The air in the space 6 is circulated at the temperature rising time, and the heat stored in the accumulator 14 is returned to the insulator 4 at the cooling time, thereby facilitating the temperature rising of a furnace.
申请公布号 JPS57106119(A) 申请公布日期 1982.07.01
申请号 JP19800182002 申请日期 1980.12.24
申请人 HITACHI SEISAKUSHO KK 发明人 NAGATOMO HIROTO;TAKAGAKI TETSUYA
分类号 H01L21/22;H01L21/00;(IPC1-7):01L21/22 主分类号 H01L21/22
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